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客座研究员-王传蔚


 

 

基本信息:

王传蔚,研究员,博士

动力机械工程专业

 

个人教育与工作简历:

2003.092008.02       清华大学动力机械博士毕业

2007.052011.09       原相科技

2011.112012.05       Miradia Inc.

2012.052012.10       Gertek Inc.

2013.072016.08       晶镁电子

2017.01–至今        QUATEK ELECTRONICS LTD.

 

研究方向:

微机电传感器

模拟感测前端电路及控制工程算法

 

代表性论文:

A. Journal Papers:

实际透过DSP使用锁相回控制用于微机电扫描镜面

1.Chuanwei Wang, H. Yu, M.Wu, and Weileun Fang,Implementation of Phase-Locked Loop Control for MEMS Scanning Mirror Using DSP,Sensors & Actuators: A. Physical, 2006.

出平面全差动间隙电容感测加速计

2.Chuanwei Wang, Ming-Han Tsai, Chih-Ming Sun, and Weileun Fang, A novel CMOS out-of-plane accelerometer with fully differential gap-closing capacitance sensing electrodes,” J. Micromech. Microeng, pp. 1275-1280, 2007.

改善CMOS 电容加速计灵敏度

3.Chih-Ming Sun, Chuanwei Wang, Weileun Fang,“On the sensitivity improvement of CMOS capacitive accelerometer,” Sensors & Actuators: A. Physical, 2007.

后制程金属蚀刻的设计与应用用于CMOS   MEMS电容传感器

4.Ming-Han Tsai, Chih-Ming Sun, Yu-Chia Liu,   Chuanwei Wang, and Weileun Fang,“Design and application of a metal wet-etching post process for the improvement of CMOS MEMS capacitive sensors,” J. Micromech Microeng, 2009.

B. Conference Papers:

使用锁相回路来控制微机电共振组件

1.C. Wang, H. Y. U, C.  Tsou , and W. Fang,Application of Phase-Locked Loop Control for MEMS Resonant Device,IEEE Optical MEMS 2005, Oulu, Finland.

全新四个感测电极之CMOS   MEMS 加速计

2.C. Sun, C. Wang, D. Liu, Michael S. Lu, W. Fang, C. Liang, H. Hsieh, H. Chang, and T. Shing, A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays, IEEE sensor 2006, Korea.

CMOS MEMS 劳伦知力双轴扫描平台

3.C. Sun, C. Wang, W. Fang, CMOS MEMS Lorentz Force Dual-axis Scanning-Stage,the 2nd Annual IEEE NEMS 2007, Bangkok, Thailand.

全新出平面加速计与全差动感测电路

4.M.-H Tsai, C. Wang, C.-M Sun   and W. Fang, 2007,“A Novel CMOS Out-of-plane Accelerometer with Fully-differential Sensing Circuit and Sub-micron Gap,” Transducers 07,   Layne, French, pp.1487-1490.

单体化传感器整合应用于CMOS   MEMS双面后制程

5.C.-M. Sun, C. Wang, M.-H. Tsai, and W. Fang,“A Novel Double-side CMOS-MEMS Post Processing for Monolithic Sensor Integration,”IEEE MEMS 2008, Tucson,USA.

 

专利:

01. Micromachined structures, No.9,070,699

02. Method for fabricating variable parallel plate capacitors, No. 8,105,498

03. Out-of-plane sensing device, No.7,849,742

04. MEMS acoustic pressure sensor device and method for making same, No.10,081,538

05. Complementary metal-oxide-semiconductor (CMOS) micro electro-mechanical (MEMS)

 microphone and method for fabricating the same, No. 11,008,215

06. Time of flight system capable of increasing measurement accuracy, saving power and/or

 increasing motion detection rate and method thereof, No. 9,618,610

07. Microphone device for reducing noise coupling effect, No. 9,491,531

08. Microphone structure, No. 9,258,652

09. MEMS microphone device and method for making same, No. 9,150,403

10. MEMS package structure, No. 9,000,544

11. 3D information generator for use in interactive interface and method for 3D information

 generation, No.8,836,761

12. MEMS structure preventing stiction, No. 8,952,463

13. Sensor manufacturing method, No. 8,828,771

14. MEMS integrated chip with cross-area interconnection, No. 8,729,660

15. MEMS sensing device and method for the same, No. 8,772,885

16. Optical detection method and optical MEMS detector, and method for making MEMS detector, No. 8,368,005

17. Micro electronic device having CMOS circuit and MEMS resonator formed on common

 silicon substrate, No. 8,692,338

18. Microelectronic device and MEMS package structure and fabricating method thereof,

 No. 8,679,886

19. Micro-electro-mechanical system device, out-of-plane sensor and method for making

 micro-electro-mechanical system device, No. 8,640,543

20. MEMS sensing device and method for making same, No. 8,519,491

21. MEMS integrated chip and method for making same, No. 8,513,041

22. MEMS device and deformation protection structure therefor and method for making same,

 No. 8,479,576

23. MEMS accelerometer with enhanced structural strength, No. 8,459,115

24. Micro-electro-mechanical system device and method for making same, No. 8,426,934

25. Mass for use in a micro-electro-mechanical-system sensor and 3-dimensional

 micro-electro-mechanical-system  sensor using same, No. 8,424,383

26. In-plane sensor,out-of-plane sensor, and method for making same, No. 8,371,167

27. MEMS device and MEMS spring element, No. 8,183,650

28. Micro-electro-mechanical-system device with particles blocking function and method

 for making same, No.7,897,506

29. Package method of micro-electro-mechanical system chip, No. 7,989,246

30. Micromachined sensors,No. 7,814,794

31. Method for fabricating micromachined structures, No. 7,785,481

32. Micro-electro-mechanical system device and method for making same, No.7,759,256

33. Accelerometer, No.7,412,888

 

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